High speed wafer-to-wafer / wafer-to-panel
With the new DS MERLIN, Mühlbauer was able to achieve a new record throughput of more than 40,000 UPH – already including full vision and sidewall inspection. On top of the significantly increased speed, the DS MERLIN shows 50% lower cost of ownership compared to other wafer-to-wafer solutions. The completely new construction method of the DS MERLIN’s core module features a special die ejector and a pick & place wheel instead of the conventional bonding technology. The machine and product setup have also been significantly simplified. With the completely automatic self-alignment system, a complex and long-lasting operator-related changeovers and set-up times are no longer required. New products can be introduced faster and easier than ever before. Due to the new construction, the inspection system with latest IR technology on sidewall and backside inspection reaches an even higher output quality. A more intuitive software interface and an enhanced wafer handling complete this brandnew die sorting system.
» Ready for ultra small die handling 0.2 x 0.4 mm
» Defect detection of 9µm defects and 5µm on sidewall
» Infrared: sidewall and backside IR inspection (down to 5 µm)